Beilstein J. Nanotechnol.2015,6, 1125–1137, doi:10.3762/bjnano.6.114
detectable step height was found to be approximately 5 nm. RIM imaging of an insulator surface without the need for charge compensation was successfully demonstrated.
Keywords: helium ion microscope; low-angleionscattering; reflection microscopy; surface imaging; surface morphology; Introduction
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Figure 1:
Schematic of the detection of reflected ions in the helium ion microscope. 1 – sample, 2 – Pt-coate...